Blanket Film Wafers (film-coated wafer) | Thai Advantec Co., Ltd.

Blanket Film Wafers (film-coated wafer)

Various kinds of flim services are available by Advantec.

Category	Film Type	Process	Category	Film Type	Process
Oxide	Th-SiO2	Thermal	Low-K	BD	CVD
	Low-Particle Th-SiO2 *	Thermal		BDⅡX	CVD
	PE-SiO2	PE-CVD		AURORA	CVD
	PE-TEOS	PE-CVD		CORAL	CVD
	LP-CVD TEOS	PE-CVD	Metal	Ta, TaN	Spatter
	HDP	PE-CVD		Ti, TiN	Spatter
	USG	PE-CVD		W	SpUtter, CVD
	PSG	CVD		Cr	Spatter
	BPSG	CVD		Cu	Spatter, EP
	RTO	Anneal		Al, Al - Cu, Al - Si	Spatter
Poly Silicon	Doped / non Doped Poly	LP-CVD		Pt	Spatter
Poly Silicon	Amorphous	PE-CVD		Ni	Spatter
Nitride	LP-CVD SIN	LP-CVD		Ru	Spatter
Nitride	PE-CVD SIN	PE-CVD		Pd	Spatter
Photo Resists	I-Line	Coating		Au	Spatter
	KrF	Coating		Co	Spatter
	ArF	Coating		etc.	Spatter

Other membrane types are also available in addition to the aforementioned types of membranes. Specification of the desired film thickness is necessary.

Low Particle Thermal Oxide Wafer (low-defect thermal oxide film wafer)

Low Particle Thermal Oxide Wafer formed in a state-of-the-art oxidizing furnace that controls particles and metal contamination is proposed.

Atomic Layer Deposition (ALD film)

Next Generation Gate Material

ALD High-K gate insulating film

Logic ... HfSiO, ZrSiO, etc

Memory ... HfO, ZrO, AlO, HfSiO, TiO, etc

ALD metal electrode

Logic ... Ti, TiN, Ta, TaN, TiSiN, TaSiN, TaSiN, HfN, HfSiN, etc

Memory ... Ti, TiN, Ta, TaN, TiSiN, TaSiN, etc

Film types in addition to the aforementioned types are also available.

Ion Implantation Wafer (ion implantation wafer)

Ion species: B +, BF2 +, P +, As +, In +, etc.
Dose: 1011 ~ 1015 ions / cm2
Acceleration energy: 5Kev ~ 4.6Mev
RTA processing

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