Blanket Film Wafers (film-coated wafer)

Blanket Film Wafers (film-coated wafer)

Blanket Film Wafers (film-coated wafer)

Various kinds of flim services are available by Advantec.

Category Film Type Process Category Film Type Process
Oxide    Th-SiO2   Thermal Low-K   BD   CVD
  Low-Particle Th-SiO2 *   Thermal   BDⅡX   CVD
  PE-SiO2   PE-CVD   AURORA   CVD
  PE-TEOS   PE-CVD   CORAL   CVD
  LP-CVD TEOS   PE-CVD Metal   Ta, TaN   Spatter
  HDP   PE-CVD   Ti, TiN   Spatter
  USG   PE-CVD   W   SpUtter, CVD
  PSG   CVD   Cr    Spatter
  BPSG   CVD   Cu   Spatter, EP
  RTO   Anneal   Al, Al - Cu, Al - Si   Spatter
Poly Silicon   Doped / non Doped Poly   LP-CVD   Pt   Spatter
  Amorphous   PE-CVD   Ni   Spatter
Nitride   LP-CVD SIN   LP-CVD   Ru   Spatter
  PE-CVD SIN   PE-CVD   Pd   Spatter
Photo Resists   I-Line   Coating   Au   Spatter
  KrF   Coating   Co   Spatter
  ArF   Coating   etc.

  Spatter

  • Other membrane types are also available in addition to the aforementioned types of membranes. Specification of the desired film thickness is necessary.

Low Particle Thermal Oxide Wafer (low-defect thermal oxide film wafer)

Low Particle Thermal Oxide Wafer formed in a state-of-the-art oxidizing furnace that controls particles and metal contamination is proposed.

Atomic Layer Deposition (ALD film)

Next Generation Gate Material

  • ALD High-K gate insulating film

    Logic ... HfSiO, ZrSiO, etc

    Memory ... HfO, ZrO, AlO, HfSiO, TiO, etc

  • ALD metal electrode

    Logic ... Ti, TiN, Ta, TaN, TiSiN, TaSiN, TaSiN, HfN, HfSiN, etc

    Memory ... Ti, TiN, Ta, TaN, TiSiN, TaSiN, etc

  • Film types in addition to the aforementioned types are also available.

Ion Implantation Wafer (ion implantation wafer)

  • Ion species: B +, BF2 +, P +, As +, In +, etc.
  • Dose: 1011 ~ 1015 ions / cm2
  • Acceleration energy: 5Kev ~ 4.6Mev
  • RTA processing
Post Date :
2018-06-19
Last Edited :
2019-07-11
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